We design an inclined dual-target cathode, standard rotating deflection stage, with the original starting point: positioning the J20 as the SUV in the ion sputtering instrument, adapting to multiple sample sputtering scenarios for Field Emission Scanning Electron Microscopy (FE-SEM).

Standard sample scenario (flat samples, analogous to flat roads):

The J20 (SUV) double target is essentially equivalent to the conventional single-target ion sputtering instrument (sedan) in effect.

3D sample scenario (powder, porous, fibers, etc., analogous to mountainous roads):

The J20 inclined double cathode, rotating deflection and layering process achieves comprehensive multi-angle large-area deposition, with superior charge effect and imaging effect compared to the single-target ISC150. Logically, spraying high-melting point Pt first can reduce the formation of small surface nuclei, ensure a more continuous charge export channel, and later spraying Au contributes more to signal quantity and surface finish. Evaluation results from Mr. Lin's testing on some cases also support this effect.

Fragile sample scenario:

When dealing with fragile sensitive materials, spraying Pt first forms a protective layer on the sample surface, followed by spraying Au to enhance the sample's leakage current capacity and signal quantity. The combination of sample rotation deflection increases the uniformity of gold film coverage, resulting in clearer and more realistic images.