![](/en/uploads/image/20240424/409239c3b88017c41982ba6498d43813.png)
Technical Specifications |
Parameters |
Vacuum Pump |
Rotary Vane Pump |
Pumping Speed |
≥4m3/h |
Ultimate Vacuum |
<1Pa |
Working Pressure |
4-10Pa(Constant Pressure Control ) |
Pumping Time |
< 3-5 Min |
Vacuum Gauge |
Pirani Vacuum Gauge |
Chamber |
Ø135*120 mm (Inner dimension) |
Sputtering Target |
Ø30*0.1-1mm ( 2 PCS ) |
Digital Sample Stage |
Ø75mm Rotary-tilting Sample Stage, Rotation Speed: 10-60RPM; Tilting Angle: ±40 Degrees; WD: 40-60mm |
Sputtering Power |
Constant Power Magnetron Sputtering DC Power Supply ( Max.20W, Max.100 mA, 0-800V DC ) |
Operation Mode |
Touchscreen Control with the Control System Providing Interlock Protection Functions |
Weight |
~21.5 kg |
Dimension |
~430 mm*407 mm*422 mm |
Power Supply |
100-220V AC, 50/60Hz Grounded Three-prong Plug |
Power Consumption |
<500 W |
Warranty |
One Year |
Under the same sputtering conditions, gold (Au) exhibits a significant charge elimination effect, but the Au particles are clearly visible. Platinum (Pt) does not eliminate charge, and in Pt-Au layered samples, there is neither charge nor clear visibility of metal particles.
For 3D sample scenarios (powder, porous, fibers, etc., analogous to mountain roads): The J20 tilt angle dual cathode, rotation deflection and layering process achieves comprehensive multi-angle large-area deposition, with better charge and image effects than single-target Pt sputtering.