Ultra-high-resolution field emission SEM can achieve magnifications in the range of 200K to 300K times, thus demanding finer granularity in metal coating.

Standard Pt or Pt-Pd alloy solutions can no longer meet these requirements well. Higher melting point Ir targets are too expensive, so high melting point metals with smaller particles like W and Cr are favored. However, due to their reactive chemical properties, W and Cr require higher vacuum levels for coating.

The ISC150T is a high-vacuum ion sputter coater that utilizes a combination of a diaphragm pump and a turbomolecular pump, capable of generating a high vacuum in the range of 10^-3 Pa. It can sputter noble metal targets such as Au, Pt, or Pd, as well as easily oxidizable targets such as W, Cr, and C. It is particularly suitable for high-resolution, high-magnification field emission SEM sample preparation.