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If TEM sample holders or samples are exposed to air or improperly stored, organic contamination can occur. Placing them in the TEM chamber can not only affect imaging quality but also contaminate the TEM chamber itself.
The IC150 plasma cleaner uses an RF power supply to ionize the incoming air, producing strong oxidative particles such as oxygen radicals, ozone, and oxygen plasma. These particles chemically react with organic contaminants on the sample surface, converting them into CO2 and H2O, which are then removed by the vacuum pump system. This process effectively cleans organic contaminants from the sample holder or sample surface.
Technical Specifications |
Parameters |
Vacuum Pump |
Oil-free Diaphragm Pump |
Pumping Speed |
>0.7m3/h |
Ultimate Vacuum |
<50Pa |
Working Pressure |
60-150Pa |
Pumping Down Time |
<2Min |
Vacuum Gauge |
Pirani gauge |
Chamber |
~Ø150*90mm Stainless Steel Chamber |
RF Power Supply |
Adjustable from 10 to 50 W, 13.56 MHz |
Operating Method |
Touchscreen Control with the Control System Providing Interlock Protection Functions |
Weight |
~20 kg |
Dimension |
~400mm*310mm*368mm |
Power Supply |
100-220V AC, 50/60Hz Grounded Three-prong Plug |
Power Consuption |
< 300 W |
Warranty |
One year |