EN
S300 HV Ion Sputter Coater
Materials that can be coated:Au, Pt, Pd, Ir, Cr, C, Ag, Ti, Cu, W
1Large-area uniform coating: Maximum support for Ø12-inch samples
2 Fast cycle time: Single coating within 20 minutes
3 Oil-free high-vacuum pump system: Clean and contamination-free, suitable for cleanrooms
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Product Introduction

The S300 is a high-vacuum ion sputtering system based on magnetron sputtering. It uses a turbomolecular pump and oil-free diaphragm pump to achieve a clean vacuum of 10-4 Pa. With its rotating sample stage, it can uniformly coat conductive films on up to 12-inch wafers using a small 2-inch cathode, reducing the cost of noble metal targets. Ideal for preparing samples for FESEM, it supports sputtering gold, platinum, and other reactive metals. The system is user-friendly with touch screen control and plug-and-play functionality.

 

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